Maruzen Petrochemical push for the LED chip nanoimprint resin

Convex surface of the LED chip, the former long-term use of lithography (photolithographic) techniques. And to break this common sense is nanoimprint (nanoimprint) technology. Nanoimprint technology is characterized at low cost in a short time interval between the formation of nano-micro bump. Maruzen Petrochemical, according to the briefing, the company will strive in 2011 to start the second half of 2012 the new plant using this technology, currently in camp and nano-imprint lithography technology camp, the state of competition.


Maruzen Petrochemical Development resin with nano-imprint "on the fluorine and chlorine gases excellent resistance to plasma etching"(the company) features. For example, on the LED sapphire substrate using the etching selectivity ratio of 0.7 to 0.8. The higher the value, the greater the substrate micromachining can be used for thinning resin layer. The resin layer coating on the sapphire substrate, the bump formed by die processing. At this time, the resin layer is thin, easily peeled off the mold from the resin, it can increase production efficiency.


Maruzen Petrochemical focus on the LED chip uses on the development of nanoimprint resin. Said to have already started to provide trial products. Products for evaluation in the use of post-test, LED light extraction efficiency effect has been recognized, then customers can significantly close to the "second half of 2011 received the first order, "the goal, the company was full of anticipation.